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Based on fractal rough surface MEMS Tribology

Author: HeYuHang
Tutor: ZhangWenMing
School: Shanghai Jiaotong University
Course: Mechanical Design and Theory
Keywords: Microelectromechanical systems Fractal Rough surface Touching Micro gas bearing
CLC: O313.5
Type: Master's thesis
Year: 2012
Downloads: 101
Quote: 0
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Abstract


Current micro-electromechanical systems (MEMS) technology is a micro- nano science research hotspot . Since the scale effect , the contact , bonding, wear and lubrication become an important part of MEMS . Based on fractal rough surface , respectively, of the MEMS contact , adhesion, wear and lubrication tribological characteristics were studied , in which the contact and adhesion properties of the finite element method -based research on the wear characteristics of the numerical methods based on the lubricating properties of the finite volume method based. The main research contents and results are as follows : 1. Introduces the theory of fractal geometry characterized rough surface , and through experimental measurements of the surface topography and its fractal dimension , and finally on the actual surface of the simulation and comparison. The results show that the fractal dimension is the characterization of the intrinsic parameters of the rough surface ; polysilicon rough surface with fractal. 2 based on fractal rough surface of the MEMS contacts , adhesion and wear characteristics . The results show that reducing the surface fractal dimension can reduce the contact area , while reducing the surface adhesion ; when the fractal dimension is between 1.45 and 1.55 between the wear rate Min . 3 Based on Fractal Rough Surface Fixed bearing gas flow Reynolds equation , and then study the rough surface of micro gas bearing performance. The results showed that the surface roughness reduces the pressure of the gas flow within the bearing , while improving airflow to face the wall shear stress ; Furthermore , the roughness but also on the bearing capacity , airflow distribution of slip velocity and Reynolds number have been affected . In conclusion, this study methods and conclusions in terms of the practical application of theoretical exploration or angles are of great significance , it is MEMS tribology research contributions a certain reference value.

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CLC: > Mathematical sciences and chemical > Mechanics > Theoretical Mechanics ( general mechanics ) > Dynamics > Friction theory
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