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Structure Optimization and Detection of Piezoelectric Micromachined Modal Gyroscope

Author: HuXiaoJun
Tutor: WuXiaoSheng
School: Shanghai Jiaotong University
Course: Microelectronics and Solid State Electronics
Keywords: Micromachining Solid-state gyro Optimization Quantitative indicators Closed-loop phase-locked
CLC: V241.5
Type: Master's thesis
Year: 2012
Downloads: 15
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Abstract


Quantitative analysis and optimization of a piezoelectric micro solid modal gyroscope size and drive relative to the general mechanical gyro or vibration gyro , solid-state gyro strong shock and vibration resistance . Gyroscope mode piezoelectric micro solid study mainly focused on the qualitative level , quantitative analysis and optimization of the basic blank . Through the establishment of a set of quantitative indicators to optimize the piezoelectric micro - solid modal gyroscope device size and driving way to make up for the quantitative analysis and optimization of the field blank . Established modal gyroscope mode set used to evaluate the piezoelectric micro solid merits of quantitative indicators , and take advantage of this set of quantitative indicators to evaluate the different size devices modal determine the optimal work mode and optimize the device size. Subsequently, we use this set of quantitative indicators to evaluate the driving effect of the device of the size of the different drive electrodes and the driving electrodes distributed manner , which has been optimized on the size of the drive electrodes and distribution methods , a new driving electrodes distributed manner , effective improve the incentive effects of the driving electrode . Then the paper gives a solid mode piezoelectric micro gyro micro- processing technology , to discuss cutting device performance indicators as well as the device installed . Finally, given the piezoelectric type micro solid modal gyroscope driving circuit and detecting circuit, and the piezoelectric type micro solid modal gyro detection . Changes due to the ambient temperature, humidity , barometric pressure , and other parameters in the actual work time for the open-loop mode before driving circuit cause gyroscope vibration mode resonance frequency drift , and within a certain range , the slight difference due to manufacturing errors or material parameters , the resonant frequency of the the different gyro individual vibration modes of different problems , this paper introduces a closed-loop phase-locked leveled drive circuit , micro solid modal gyroscope gyro resonant frequency tracking , the driver of the constant amplitude signal, a good solution to the above problems.

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CLC: > Aviation, aerospace > Aviation > Aircraft instrumentation,avionics, flight control and navigation > Aircraft instrumentation,aerospace equipment > Gyro instrument
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