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NdFeB magnets have excellent magnetic properties and commercial value, widely used in electronics, information and communications industries. The film is now NdFeB permanent magnet film hot research field, with potentially huge economic and academic significance. However, due process and other aspects of the imperfect, the actual magnetic properties with the theoretical value is still a big gap. This paper first film in recent years the development of rare earth permanent magnet made a brief introduction, including thin films, annealing and other aspects. This paper was prepared by DC magnetron sputtering NdFeB permanent film. First, using a variety of different thin films prepared by sputtering parameters, using scanning electron microscopy (SEM) analysis of the different sputtering power, argon partial pressure and other parameters on the morphology of the film; secondly sputtering power of different samples after crystallization annealing different morphology by X-ray diffraction (XRD) studies sputtering power on the film crystallization effects and found the film at a low temperature annealing in NdFeB nanoparticles aggregation phenomena; Finally vibrating sample magnetometer meter (VSM) magnetic properties of the test sample, drawn film sputtering power, argon partial pressure, annealing temperature and the magnetic properties of the films. The main conclusions of this paper are obtained: 1. Experiment using a 30w, 60w, 100w three different film was prepared sputtering power, sputtering found 30w uniform particle size of the sample, closely arranged; 100w sample surface and has a large island like particles appear, with the overall difference between the larger particle size (2) the uniformity of the film found its crystallization is a huge influence. In 30w, 60w, 100w three different sputtering power samples annealed at 550 ℃ for comparison, 30w crystallinity best, Nd2Fe14B characteristic peaks obvious, and 100w crystallization is the worst. 3.550 ℃ films began crystallization and 30w, 60w found in samples of nano floc particles agglomerate phenomenon. 4 analyzes the different annealing temperature (550 ℃, 600 ℃, 650 ℃, 700 ℃, 750 ℃) after crystallization differences in the magnetic properties, the results show, 650 ℃ annealed samples after crystallization has the highest integrated magnetic properties, 700 ℃ for crystallization of the sample with the highest remanence ratio but strong saturation magnetization, remanence, coercivity decreased. And annealed at 550 ℃ and 600 ℃ sample comparison and found that the latter has a great jump in the magnetic properties, suggesting that this temperature range to begin mass crystallization five films with different sputtering power (40w, 60w, 80w) annealed samples prepared under crystallization and test its magnetic properties, find the best magnetic 40w sample, with the increase in power, magnetic decreased. This indicates that the film sputtering power factors can cause poor organization of their magnetic properties after annealing down, 6 different sputtering pressure (0.5pa, 1.0pa, 1.5pa, 2.0pa) sample preparation, 650 ℃ annealed analysis, 0.5pa 1.0pa samples prepared and has good magnetic properties, and further increase the sample after magnetic pressure variation.
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