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MEMS Processing Technology and Heat Treatment on High-Q Optical Toroidal-cavity

Author: JiaPengFei
Tutor: GuoTao；ZuoShuBin
School: University of North
Course: Microelectronics and Solid State Electronics
Keywords: Microdisk cavity Micro-ring cavity Quality factor Crude salvation
CLC: TP211.4
Type: Master's thesis
Year: 2011
Downloads: 62
Quote: 1
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Abstract


The unique optical transmission mode - corridors mold ( the Whispering Gallery Mode WGM ) optical micro - cavity , as well as ultra-high quality factor and small cavity mode volume become to explore nonlinear optics , cavity quantum electrodynamics powerful tools , at the same time in the light integration , there are important potential applications in the field of optical network and optical quantum entanglement in computing . The optical microcavity main categories , including the the microsphere cavity micro - cylinder planar microcavity ( plane microdisk cavity and planar ring microcavities ) . This paper is about the plane micro- ring cavity , combined MEMS micro- structure technology , design , and production of the heat treatment, high-Q optical micro- ring cavity . And its Q value measurement structures coupled system . Thesis work include : a thesis selected the the silica material plane microcavity . Thermally grown on the (100) crystal plane of silicon growth layer two microns thick SiO2 first , and then proceed to the gumming exposure; etching of the silica layer by wet etching (HF/H2O solution ) and dry etching ( reactive ion beam etching ) ; etching of silicon pillars using ICP etching system and XeF2 etching system . Ultimately microdisk cavity . 2 after the preparation of the micro- disc cavity using oxyhydrogen flame the fused fiber prepared microspheres chamber principle, for microdisk chamber create a physical model of the laser reflux deduced microdisk cavity surface temperature somewhere in the laser processing . ANSYS simulation of laser reflow process . 3 Diamond K -500 CO2 pulsed laser and sealed off carbon dioxide laser the laser reflow processing system . Two sets of processing optical path in the course of the experiment done processing experiments . The thermal stress generated in the process of reflux microdisk cavity the Raman test, obtained by analyzing the data suitable for the laser processing power and the corresponding thermal stress . 4 built coupling test the quality factor of the microcavity system . FBT-200 - nm fiber pull cone machine system drawn out of the cone of 1μm-2μm tapered fiber . A brief analysis of the various factors that affect the Q value of the microcavity structures of the coupled system and AFM system microcavity reflux before and after the Q value and crude salvation test results show that the micro- ring cavity after laser reflux reduces surface roughness salvation at the same time improve the quality factor of the microcavity .

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