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Research of System for MEMS Electret-Based Micro Vibratory Power Generator

Author: LiuXueHua
Tutor: WenZhiYu
School: Chongqing University
Course: Instrument Science and Technology
Keywords: Vibratory Generator MEMS Electret
CLC: TH703
Type: Master's thesis
Year: 2006
Downloads: 217
Quote: 3
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Abstract


Micro power is one of the most important research directions of the development of MEMS technology, the countries in the world in recent years, a hot research. In this thesis Throughout the micro-power development in the world based on application requirements for implantable devices, distributed systems, wireless communications, transportation, aerospace, field investigation, weaponry, the national \theoretical significance and urgent needs of the background. Papers in microelectronics and MEMS technology based on a comprehensive analysis of external environment, energy conversion based on the principle of electromagnetic, electrostatic or piezoelectric micro-electrical energy vibration generator proposed, based on the principle of electrostatic induction in extremely body and a pair of MEMS interdigital capacitor composed the micro vibration generator of new ideas and new methods. Micro vibration generator structural design analysis and simulation to determine the overall system structure; structure, materials, processing technology, the exploration and study of the circuit and test key technologies developed experimental principle prototype conducted test and experimental analysis. The main research work: an analysis of micro-power development in the world, in particular the development status and trends of micro vibration generator system analysis; 2 more in-depth studies of electrostatic micro vibration The generator of the basic principles and theory, and structural design calculations and simulations of the whole system; conducted the electrostatic micro vibration generator technology research, the completion of the process design and process test, developed experimental prototype. The main parameters are as follows: the typical operating frequency of 1200Hz, the load is 300k? The miniature generator output voltage of 2V, the output power reaches 12.5μW; designed by a resonant converter for the output signal characteristics of the micro-vibration generator, rectifier, a filter circuit composed of the processing circuit, and application software for OrCAD / Pspice simulation optimization circuit to meet the test requirements. Designed experimental system of the vibration generator, vibration micro generators samples of developed experimental testing and demonstration experiments, and the experimental results were analyzed and discussed.

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CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > General issues > Structure
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