Dissertation > Excellent graduate degree dissertation topics show

AFM measurement of characteristics of

Author: HuangYu
Tutor: ZhuRuoGu
School: China Institute of Metrology
Course: Measuring Technology and Instrument
Keywords: Atomic force microscopy (AFM) Sub-resonant amplitude mode Three-dimensional calibration The measurement type scanning needle microscope (MSPM)
CLC: TH742
Type: Master's thesis
Year: 2006
Downloads: 75
Quote: 2
Read: Download Dissertation

Abstract

Nanoscience is one of the important areas of global technology development in the 21st century, nano-bio-, nano-materials, nano-devices, nano-measurement, nanotechnology microelectronics .... \The size of the real reality, nano-metrology imperative. Both transfer standard preparation, the international transfer standard measurement-based scanning probe microscopes Series (MSPMS) is developed, and the error correction of the measurement results, the the SPM measurement uncertainty degree system of the establishment are all around the world are the hot issues of the measurement of research workers. On the basis of a careful analysis of the world nanometrology Research, in the case of actual conditions allow, focus on the working mode of the AFM probe AFM one-dimensional grid-shaped measuring the XY plane of the one-dimensional grid-shaped image of AFM the operating characteristics of the Z-axis direction calibrated and solved based on the FT and FFT pitch is further reflected in the the AFM measurement accuracy, based the dual FP MAFM the last completed on the basis of the content of the original country funds and national key projects of the Ministry of Education, The general theory of design. Among them, the content and difficulty of the study of this paper include: (1) in the discussion of the various operating modes of AFM probes, starting from the basic principle of vibration, focusing on the cantilever vibrations of small amplitude AC tapping mode, its difficulty is how to select the cantilever stiffness, quality factor, interaction stiffness parameters to achieve the requirements of the measurement of the stability of atomic-level measurement accuracy, resolution, theoretically verify the superiority of the sub-resonant AM small amplitude mode to achieve a linear relationship between the force by the probe and the sample surface, which is a new field in the research of the probe operating mode; (2) in the AFM measurement of a one-dimensional grid, the premise of ensure that the measurement environment and the measurement condition is satisfied , the use of the AFM measurement calibration of one-dimensional diffraction grating; then SPIP error correction on a single part of the scanned image, in order to achieve the calibration of the AFM three-dimensional motion characteristics, and through multiple, multi-part analysis of the scanned images to verify the calibration repeatability; finally introduced by Fourier spectrum diagram windowing function and filtering the image of the grid-shaped noise processing, to determine the grating pitch; (3) in the use of the principle of double FP interferometer for MAFM overall design, complete the PZT drive system and the interferometer system integration. Design two sets, the first set only for traceability, the second set of positioning both traceable there mainly discuss how to make the interference with the probe Z-axis positioning. In addition, it will also discuss how to achieve the interference signal into the probe displacement amount and how the light source of the three-dimensional interferometer system design. For the most important and difficult problem, depth and comprehensive theoretical and experimental studies were made to verify the linear relationship of the probe and the sample surface force cantilever AM Asian resonant amplitude mode theory is AFM probe further improvement of the characteristics of the work has laid a theoretical foundation; the SPIP software Some features after calibration of the AFM three-dimensional characteristics, so that the average position of the XY plane deviation reduced to sub-pixel level, through a long period of continuous measurement to verify the calibration the repeatability of the system, and the Z-axis direction to get the best value of the error correction r = 0.9986; in design MAFM, double FP interference system completed the AFM probe positioning and traceability function, the light source The design is not the practice of the traditional three-dimensional direction of the three sets of He-Ne laser, a He-Ne laser, \The implementation of features that provide a new solution.

Related Dissertations

CLC: > Industrial Technology > Machinery and Instrument Industry > Instruments, meters > Optical instruments > Microscope
© 2012 www.DissertationTopic.Net Mobile