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Numerical Simulation of Short Pulsed Discharged Using PIC-MCC Model

Author: SangChaoFeng
Tutor: WangDeZhen；SunJiZhong
School: Dalian University of Technology
Course: Plasma Physics
Keywords: Particle simulation Plasma immersion ion implantation Dielectric barrier discharge Corona discharge Needle plate discharge Nanosecond pulse
CLC: O53
Type: Master's thesis
Year: 2010
Downloads: 188
Quote: 2
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Abstract


Plasma particle simulation (PIC-MCC) is obtained by tracking a large number of charged particles moving in electric field simulation of a basic amount and the laws of motion of macroscopic properties. This method has a high accuracy, plasma comprehensive advantages. In this paper, the PIC-MCC model short pulsed discharge plasma simulation study. Based on the latest power technology development as well as short-pulse plasma experiment, the research is divided into three aspects: nanosecond rising pulse immersion ion implantation, nanosecond pulsed atmospheric pressure dielectric barrier discharge study nanosecond pulse needle plate discharge study. Plasma immersion ion implantation (P Ⅲ) is a material surface treatment technology. The basic process is the target immersed in the plasma, and then a series of high voltage negative pulses is applied, under the action of this pulse, ions are directly extracted and accelerated to the target. With the development of power technology rising edge of the pulse will be shorter and shorter, this advanced pulse power will gradually replace the pulse power applied to the P Ⅲ them. However the research the \This paper studies the nanosecond rising edge of the pulse P Ⅲ. Through to the plasma density, current, the implantation energy, implantation dose, and other parameters of the study, we found NS rising edge of the pulse can increase the plasma density, the implantation energy and dose, and thus effectively increase the injection efficiency. Atmospheric pressure discharge does not require expensive vacuum systems, reducing equipment requirements and operating costs, and therefore aroused widespread concern. Dielectric barrier discharge (DBD), also known as the silent discharge up an atmospheric pressure discharge method in use today, the traditional DBD discharge using AC power, discharge, including a lot of micro-discharge channel, these the microdischarge channel will lead to local overheating, this local overheating effects limit DBD in biomedical applications. The researchers found that nanosecond pulsed dielectric barrier discharge can avoid local overheating due to discharge of the microchannel, uniform plasma high density. PIC-MCC method is using the physical mechanism of the nanosecond pulse DBD; results show that nanosecond pulse the DBD can effectively increase the discharge current, to improve the plasma density; secondary electron plasma density can be further improved, increasing the plasma region. Corona discharge is a common discharge mode, the two electrodes of the discharge at least a small radius of curvature of the electrode. This work was supported by PIC-MCC simulation nanosecond pulse needle plate discharge. Explained in detail the discharge needle plate physical mechanisms, as well as the impact of the tip radius of the discharge. The study shows that the gas pressure changes that result in a discharge mode shift; carried out a detailed analysis of its causes of changes through the analysis of high-energy electrons.

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