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Preparation and Catalytic Properties of Supported Cobalt Silicide by Metal Organic Chemical Vapor Deposition

Author: ZhaoAnZuo
Tutor: LiangChangHai
School: Dalian University of Technology
Course: Chemical processes
Keywords: Metal organic chemical vapor deposition Cobalt silicide Catalytic Hydrogenation Naphthalene
CLC: O643.36
Type: Master's thesis
Year: 2010
Downloads: 59
Quote: 0
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Abstract


Transition metal silicide having a high melting point, low resistivity, good chemical inertness, and thermal stability properties are widely used in the semiconductor fields. However, the preparation of existing technology to limit the study and application of transition metal silicide as a catalytic material. In this paper, metal organic silicon compounds Co (SiCl3) (CO) 4 as a precursor to SiO2, SBA-15, CNTs and Al2O3 as carrier successfully prepared by metal organic chemical vapor deposition method supported transition metal cobalt silicide. X-ray diffraction (XRD), N2 physisorption, transmission electron microscopy (TEM), program TPR (H2-TPR) and temperature-programmed desorption (H2-TPD) techniques or methods to characterize the catalysts prepared and investigated performance of of supported cobalt silicide naphthalene catalytic hydrogenation. Further in situ infrared (in-situ FT-IR) spectroscopy have been used to study the the supported cobalt silicide formation mechanism. The results show that: 1. Cobalt carbonyl and trichlorosilane as a raw material successfully synthesized metal organic precursors the Co (SiCl3) (CO) 4. Infrared spectroscopy, nuclear magnetic resonance spectroscopy and elemental analysis data proved Co (SiCl3) (CO) 4 structure and composition; 2. Of Co (SiCl3) (CO) 4 precursor SiO2 as the carrier, in a homemade fluidized bed MOCVD The apparatus prepared under atmospheric pressure a highly dispersed CoSi/SiO2 catalyst. The results show that the particle diameter of about 2-3 nm CoSi particles are uniformly dispersed in the silica carrier. Than 7.0% of a 13.5% CoSi/SiO2 catalyst and of 17.1% CoSi/SiO2 catalyst having a high hydrogenation activity and higher tetrahydronaphthalene selectively attributed CoSi the particle size effect and CoSi particles with a carrier SiO2 interaction impact ; 3. of Co (SiCl3) (CO) 4 precursor, SBA-15 as the carrier, using MOCVD Prepared highly dispersed CoSi/SBA-15 of catalyst. The results show that the CoSi particle diameter of about 2-4 nm, uniformly dispersed within carrier SBA-15 channels. A 8.3% CoSi/SBA-15 catalyst and naphthalene in a low conversion rate, but high tetrahydronaphthalene selectivity were 100%. And 16.1% CoSi/SBA-15 as a catalyst has high catalytic activity of up to 87%, while the selectivity of tetralin lower only 35%; 4. CNTs as the carrier, was not observed the formation of any particles, but EDX in the presence of a small amount of cobalt and silicon elements; Al2O3 as the carrier, the product obtained is CoCl2/Al2O3 5 in the MOCVD process, the SiO2 carrier, the carrier gas H2 is successfully prepared a highly dispersed CoSi/SiO2 catalyst Ar as the carrier gas, only to get blue CoCl2/SiO2. Situ FT-IR results indicate that by introducing the H2 as a carrier gas, changing the precursor decomposition pathways, reducing the decomposition temperature, which can be prepared at a lower temperature load CoSi catalyst.

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CLC: > Mathematical sciences and chemical > Chemistry > Physical Chemistry ( theoretical chemistry ),chemical physics > Chemical kinetics,catalysis > Catalytic > Catalyst
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