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The Solutions of Doped Poly Defect in 90NM Nrom Word Line Process
Author: ZhangWeiMin
Tutor: RongGuoGuang
School: Shanghai Jiaotong University
Course: IC Engineering
Keywords: 90nm NROM Word line defect Doped polysilicon layer Furnace tube
CLC: TP333
Type: Master's thesis
Year: 2011
Downloads: 4
Quote: 0
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Abstract
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CLC: > Industrial Technology > Automation technology,computer technology > Computing technology,computer technology > Electronic digital computer (not a continuous role in computer ) > Memory
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