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The AIN film IF sputtering Preparation and bulk acoustic resonator developed

Author: WangZhenZhong
Tutor: LiuXingZuo
School: University of Electronic Science and Technology
Course: Materials Science and Engineering
Keywords: Aluminum nitride thin film Polyimide Frequency magnetron sputtering The thin film bulk acoustic resonators
CLC: TN713
Type: Master's thesis
Year: 2011
Downloads: 47
Quote: 0
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Abstract


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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Basic electronic circuits > Filtering techniques,the filter
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