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Design and Implementation of the Micro-component Tensile Test System

Author: HouZhiWu
Tutor: ZuoJinKui
School: Dalian University of Technology
Course: Mechanical and Electronic Engineering
Keywords: MEMS Data acquisition Monocrystalline Static tensile tests
CLC: TH703
Type: Master's thesis
Year: 2008
Downloads: 133
Quote: 1
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Abstract


With the development of MEMS, micro-component materials mechanical properties of growing attention by researchers at home and abroad, but the mechanical properties of the micro-component parameters of the test proceeds highly dispersed, even the most basic elastic modulus are not a unanimously accepted the results. During MEMS structural design, due to the lack of micro-component material mechanical properties of the underlying data, and have not established an effective mechanical reliability design criteria, which seriously hampered the development of MEMS. Therefore, the subject test of the mechanical properties of MEMS materials starting point, test and measurement technology for MEMS typical material in depth research, the purpose is to provide theoretical guidance and data support for typical MEMS device structure design and processing technology, thus improving the performance of MEMS devices, The yield and reliability. On the basis of previous work, the main work of this paper is to design and build a simple structure, reliable performance, high precision test the mechanical properties of the micro-component test platform, and monocrystalline silicon sample microns pull stretch test experiments. The test system uses a piezoelectric actuator as the driving force; piezoresistive micro-force sensor chip detection of the load on the specimen tensile force; inductive displacement sensors detect tensile specimen displacement; micro-positioning The clamping mechanism on the sample installation and adjustment; CCD measurement technology of the specimen clamping, load-line real-time monitoring; using data acquisition card and frame grabber to collect test data and IPC interaction. Hysteresis, creep adverse characteristics for piezoelectric ceramic exist on a piezoelectric actuator closed-loop PID control algorithm, the overall stiffness of the mechanical structure of the entire test platform for the presence of micro-force sensor output displacement phenomenon calibration experiments using LabVIEW graphical programming language micro-component tensile test monitoring and control software, including data acquisition, data preservation, image acquisition, video capture, image calibration, image application and piezoelectric ceramic closed-loop PID control functions. Last five monocrystalline specimen tensile tests, sample stress and strain, calculated of monocrystalline silicon micro Elastic Modulus average of 163.2 ± 5 Gpa contrast existing monocrystalline silicon micro-component pull stretch experimental test results, you can learn the test results of this article and some foreign research institutions consistent data, to verify the feasibility of the test system and control software. At the same time, to test experimental system errors and improved outlook.

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