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Electrostatic discharge (ESD) in the chip manufacturing process and countermeasures of

Author: ZhaoJunPing
Tutor: SunKePing
School: Shanghai Maritime University
Course: Power Electronics and Power Drives
Keywords: Electrostatic Discharge Electrostatic discharge sensitive devices Electrostatic discharge model Electrostatic discharge protection zone Ion fan
CLC: TN405
Type: Master's thesis
Year: 2003
Downloads: 356
Quote: 1
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Abstract


With the rapid development of the electronics industry , the dangers of static electricity in the production and use of electronic products are becoming more serious , causing incalculable economic losses . In the United States, for example , electronic industrial sector up to $ 10 billion annual loss caused by static electricity . Electrostatic hazards in the electronics industry , mainly for electrostatic discharge . Electrostatic discharge makes electronic components failure or the existence of hidden dangers, and even electronic products completely damaged . In this thesis, this paper discusses the causes of electrostatic discharge in the chip production process as well as the hazards of electronic products from electrostatic discharge mechanism , and focus on the theory and practice of chip the manufacturing workshop electrostatic test . On this basis , the actual testing work in Shanghai Belling AG is based on a variety of equipment in aging workshop, testing workshop , semi-finished products warehouse workshop and finished goods warehousing workshops and other anti- static work area test data and a brief assessment of the test results , some technical advice . The paper also describes the three main electronics industry electrostatic discharge test model : the human body model , machine model and charged device model electrostatic discharge sensitive device classification criteria proposed ESD protection design ideas and the development of ion fan trend , the technological foundation so as to further explore and improve the IC manufacturing process ESD comprehensive Countermeasures .

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Microelectronics, integrated circuit (IC) > General issues > Manufacturing process
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