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Experiment Investigating on Mechanism of Nano-machining, Nano-scale Structure Generating and Measuring for Surface

Author: WuHui
Tutor: LinBin
School: Tianjin University
Course: Mechanical Manufacturing and Automation
Keywords: Nanofabrication Molecular dynamics simulation Monocrystalline Scanning probe microscopy (SPM) Surface morphology detection
CLC: TG669
Type: Master's thesis
Year: 2004
Downloads: 367
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Abstract


Nanotechnology ultimate goal is to create a specific function of the product to the nanoscale . The traditional processing theory has been unable to meet the the nanoscale processing needs , the nanofabrication mechanism on the urgent need to address the problem . At present, the research methods of molecular dynamics (MD) simulation and scanning probe microscopy (SPM) technology is widely used in the the nanofabrication process mechanism analysis and nanofabrication experiments . Based on the molecular dynamics theory , combined with conventional turning , established nanoscale diamond tool of monocrystalline silicon workpiece machining molecular dynamics simulation model , and the preparation of the simulation software , simulation computing , simulation results are observed , analysis the nano-scale chip formation and machined surface generation mechanism . The results show that : in nanometric cutting of brittle - hard materials monocrystalline silicon based plastic removed and analyzed from the perspective of the crystal lattice deformation ; tools sharp is conducive to the formation of the chip ; negative rake angle cutting tools , workpieces before and after the workpieces volume significant changes in the crystal phase transition due . Furthermore, by means of SPM in the surface of the monocrystalline silicon wafer nanofabrication experiments , the establishment of a mathematical model of the electric field between the probe and the sample distribution SPM machining ; analysis nanostructure generating mechanism that is a silicon atom in an electric field complex the electrochemical reaction ; pointed out that the factors that affect the processing . Finally, use of the SPM machined surface morphology detection experiments , were evaluated from multiple perspectives on the surface , that SPM superiority in the field of surface inspection .

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CLC: > Industrial Technology > Metallurgy and Metal Craft > Metal cutting and machine tools > Special machine tools and processing > Other special processing equipment and its processing
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