Dissertation > Excellent graduate degree dissertation topics show

Research on Silicon Based Shallow Etching Micro/nano Grating Beam Splitters

Author: GuoJunLei
Tutor: HeXingDao
School: Nanchang University of Aeronautics and
Course: Measuring Technology and Instruments
Keywords: silicon-on-insulator material rigorous coupled wave analysis Leakymould resonance polarizing beam splitter finite different time do-main
CLC: TN256
Type: Master's thesis
Year: 2012
Downloads: 65
Quote: 0
Read: Download Dissertation

Abstract


Grating is an enduring source of optical device, it is still during the process of developing and improving with the developments of modern micro-nino production technology and integrated photonics circuit especially the development of silicon-based photonics. As with other photoelectric devices, grating makes great contribution to the developments of economy and society, To silica-based integrated circuit, grating possesses many advantages such as convenient to the phase matching, beam coupling and shaping, and wavelength conversion; moreover, it has the simple structure and craftsmanship, and easy to integration, has been widely used in the integration of the light path of active and passive components. In view of the silica micro-nano optical device is used to realize the light path integration, chip photoelectric conversion and detecting, all research contents of this paper will focus on the micro-nano scale.In this paper, two kinds of beam splitter of structure silicon-based micro-nano grating have been researched based on rigorous coupled-wave analysis and the finite-different time-domain, and take example by silicon-on-insulator (SOI) material system that used into the microelectronics processing technology:(1) By using the asymmetric gratings to control spectrum component of the grating regional distribution and stop the leak mode in grating fast attenuation, so as to realize the broadband, large Angle, and high diffraction efficiency unique properties, This paper has designed and optimized a double function of the single polarization grating splitter that, when TE polarization wave (nearby1550nm band) perpendicular incident, the reflectivity of this device can reach the97%; when TM polarization wave perpendicular incident, its can produce about50:50light reflection and transmission. In addition, we use the finite difference time domain algorithm rigorous coupled wave analysis method validation of the grating the correctness of design.(2) In addition, based on multi-level uniform cycle of grating structure, this paper has also designed and optimized a kind of1x3sub-wavelength grating power splitter which possesses high performance and polarization irrelevant,. Nearby the1550nm band, when the incident light illuminate vertically, the device to TE of polarized light grade0and grade±1transmission rate of31%,32%and32%respectively; For TM polarized light grade0and grade1transmission rate of33%,32%and32%respectively.

Related Dissertations

  1. Research on the SPR Sensor of Metal Grating,TP212
  2. One-dimensional photonic band gap structure Numerical Methods,O734
  3. Design and Characterization of Controllable Linewidth Guided-mode Resonance Filter,TN713
  4. Simulation and Experiment on Optical Characteristic of Micro-nano Structure in Morpho Scales,Q811
  5. Study on Crosstalk of PCB Microstrip Line in MRTD Method,TN41
  6. SiO_2 nanoparticles on the application in optical devices,TH74
  7. Fabricaion of Silicon Nanowires and the Optical Properties,TB383.1
  8. The Research of Sensors Based on Surface Plasmon Resonance,TP212
  9. Study on Multi-layer Optic Disk Readout Technology with Confocal Microscopy,TP333.4
  10. Study on the Propagation Characteristics and Pattern Recognition of the UHF Partial Discharge Signal in GIS,TM835
  11. Lithography mask near field simulation of two-dimensional Fourier analysis and expansion rigorous coupled-wave analysis,TN305.7
  12. Study on POTDR sensor technology,O436.3
  13. The Research on Electromagnetic Logging Response in Anisotropic Formation Using Finite Difference Time Domain Method,P631.81
  14. Measurement and Research on Vibration Amplitude Based on Self-mixing Interference Effect in Semiconductor Laser,TP274.5
  15. Subwavelength structures of binary optical device design,TN253
  16. In the projection display optical film and the light switch Application,O484.41
  17. Projection display system polarization analysis and polarization devices,TN946.1
  18. Digital Level Optical Imaging Systems Design and Implementation,TH761
  19. SOI Novel Structure Fabrication and Investigation of Suspended Type Thin Film Resonator Based on SOI,TB534
  20. Binary optical elements vector diffraction parallel direct-write design and production,TH74
  21. Design based on the transmission volume holographic grating wavelength division multiplexer,TN26

CLC: > Industrial Technology > Radio electronics, telecommunications technology > Photonics technology,laser technology > Optical waveguide and integrated optics > Integrated optical devices
© 2012 www.DissertationTopic.Net  Mobile