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Electronically Programmable Fuse Structure Design Base on Cobalt Silicide Electromigration

Author: LinKun
Tutor: HeBoYong
School: Shanghai Jiaotong University
Course: Software Engineering
Keywords: Electrically programmable fuse Electromigration CMOS Integrated Circuits Redundancy technology Silicide Salicide
CLC: TN402
Type: Master's thesis
Year: 2008
Downloads: 22
Quote: 0
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Abstract


In order to improve the productivity of the integrated circuit , to avoid the chip device failure and cause the entire circuit failure , and the introduction of redundant technology based on antifuse technology . Electrically programmable fuse eFUSE, with its small size , low cost , can be reduced and strong after packaging configuration and many other advantages , and thus plays an increasingly important role in modern IC design . This paper summarizes the current research status eFUSE -depth analysis of the parameters affecting the fuse structure , and in-depth analysis of the existing structure , pointed out that the current structure of the bottleneck problem , and proposed specific programs of structural optimization . Then the planning of projects and programs , in accordance with the progress of various improvement programs for manufacturing, testing, data collection and collation , analyze the pros and cons of the first round of the structural design for the second round of structural development , considering the results of SEM observation . Finally , the design example of the structure of to optimize eFUSE Part , the reliability of the authentication failure after the acceleration test data and temperature , the optimized structure of high -Acting , after fusing , a large resistance value , the distribution is narrow , and high reliability.

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CLC: > Industrial Technology > Radio electronics, telecommunications technology > Microelectronics, integrated circuit (IC) > General issues > Design
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