Dissertation > Excellent graduate degree dissertation topics show

The Preparation and Application of Antireflective AZO Thin Films

Author: XuLi
Tutor: DuGuoPing
School: Shanghai Normal University
Course: Theoretical Physics
Keywords: AZO thin film transparent conductive film aluminum induced crystallization deposition temperature annealing temperature
CLC: O484.1
Type: Master's thesis
Year: 2011
Downloads: 60
Quote: 0
Read: Download Dissertation

Abstract


AZO thin films doped SiO2 are prepared by co-sputtering on the quartz surface. The ratio was changed to be 1:1, 2:1 and 4:1 （AZO film thickness: SiO2 film thickness）. At the same time, the deposition temperature was changed too. The results show that samples of 4:1 doping ratio achieve the largest grain size which is 36nm at 500℃. The lowest resistance which is 1.79×10-1Ωcm also appeared at 500℃with the 4:1 doping ratio. Samples mixed a certain proportion of SiO2 increases the optical transmittance to 87%-90%. Improving the deposition temperature or reducing the doping ratio of SiO2 could also decrease the band gap. Obviously, the AZO thin films doped with SiO2 would reduce the AZO refractive index in the visible range. It is interesting that improving the deposition temperature could also reduce the AZO refractive index and achieve a very small resistivity.The affect of different annealing temperature and different aluminum depositing temperature on the crystallization process of amorphous silicon thin film is studied, when the quartz glass is applied as the substrate. Using the optical microscope and RAMAN, surface morphology, the structure of the silicon film after annealing are observed. The aluminum film surface structure and morphology at different depositing temperature are studied by scanning electron microscope （SEM）. The results show that the amorphous silicon thin film will crystallize significantly after annealing at applicable temperature. Increasing aluminum depositing temperature may make amorphous silicon film crystallize easily annealed at 650℃.

Related Dissertations

  1. Study on the Synthesis and Properties of Poly(1,4-Cyclohexyledimethylene Terephthalate) (PCT),TQ323.4
  2. The Mutation Screening and the Production Optimization of Avermectin Producing Strain,TQ450.6
  3. Preparation and Physical Properties of （BEDT-TTF）（FeBr4 ） Crystal,O73
  4. Heat Resistant Research of Biodegradable Polylactic Acid Materials,TQ320.7
  5. The Study of Preparation and Photocatalytic of Compound Nanomaterials TiO2/SnO2,O643.36
  6. Devolatilization Via Purging with Nitrogen to Synthesize Nylon 69 and the Experimental Study of Its Thermal Analysis,TQ323.6
  7. On the Realization of Floating Mortgage,D923
  8. PTT cationic dyeable copolyester synthesis and properties of,TQ323.41
  9. The Study of Preparation and Properties of Flame-retardant Poly (Triethylene Terephthalate) Copolyesters,TQ323.41
  10. Synthesis and Properties Research of Poly (Trimethylene Terephthalate),O633.14
  11. Study of Crystallization Process of Magnesium Hydroxide,TQ132.2
  12. Studies on the Effects of Diacid with Long Carbon Chain on PBT’s Crystallization and Melting Behavior,TQ316.3
  13. Microwave Enhanced Reaction Crystallization Process of Hydromagnesite,TQ132.2
  14. Electroless Ni-Pon the Bulk Nanocrystalline Ingot Iron,TQ153.1
  15. Studies on the Effects of Comonomer with Fumarate Segment on PBT’s Crystallization and Melting Behavior,TQ323.4
  16. Study on the Purification of Maltose by Ion Exchange Chromatography and Its Crystallization,TS245.5
  17. Study on the Spinnability of Semi-Aromatic Polyamide,TQ340.1
  18. Studies on Plasma Enhanced Atomic Layer Deposition,TN304.055
  19. Synthesis, Characterization and Crystal Properties of Stereoblock Polylacitc Acid,TQ320.1
  20. Nonlinear and Micro- And Nano-Hotonic Properties of Silicon Based Materials,TN304.12
  21. Rheology and Crystallization Properties of β Nucleating Agent Modified of PPR,TQ325.14

CLC: > Mathematical sciences and chemical > Physics > Solid State Physics > Thin Film Physics > Film growth,structure and epitaxy
© 2012 www.DissertationTopic.Net  Mobile