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Silicon thin - film micro- structure study of manganese ( iron )

Author: WangJiaLe
Tutor: JiangZuiMin
School: Fudan University
Course: Condensed Matter Physics
Keywords: Raman spectroscopy Double-crystal X-ray diffraction MnSi FeSi Magnetic semiconductor Magnetic metal
CLC: O484.4
Type: Master's thesis
Year: 2009
Downloads: 56
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Abstract


( 1 ) using Raman spectroscopy study silicides such as MnSi x and the FeSi x < / sub> film microstructure using Raman spectroscopy to study the different annealing temperatures silicides such as MnSi x film microstructure and FeSi x , for the first time to determine the two manganese silicon compounds , MnSi phase 1.73 < / phase and MnSi phase Raman spectroscopy . Each phase of a manganese silicon compound in 300 cm -1 a set of three peaks in the vicinity of the Raman spectrum, they can be used for determining the formation of manganese - silicon compound fingerprint . Compared to conventional XRD method , Raman spectroscopy, for the study of the micro-structure of the manganese - silicon compound is more sensitive , especially in the initial stage of the manganese - silicon compounds formed . Preparation of Fe -doped in the epitaxial growth of Si film was found by Raman spectroscopy , the quality of the epitaxial film and the control phase separation can be improved by controlling the thickness of the grown film . (2 ) double-crystal X-ray diffraction (DCXRD) Mn-doped and Fe - doped silicon thin-film micro- structure of double-crystal XRD is used to study the Mn-doped and Fe - doped Si thin film microstructure . We measured the Si (400) peak near the projection . When the Si (400) peak on the right projection and is due to the Mn or Fe atom in the gap position caused because they decrease the lattice constant . When the peak of Si (400) left projection is due to the Mn or Fe atom in a substitutional position caused because they increase the lattice constant .

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CLC: > Mathematical sciences and chemical > Physics > Solid State Physics > Thin Film Physics > The nature of the films
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