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Preparation of Thin-film Solar Cell Window Material SnO2 by PECVD and Its Performance Research

Author: LuoZhiQing
Tutor: LiuMingHai
School: Huazhong University of Science and Technology
Course: Pulsed Power and Plasma
Keywords: SnO2 film PECVD (Plasma Enhanced Chemical Vapor Deposition) thin-film solar cells window material
CLC: TM914.42
Type: Master's thesis
Year: 2009
Downloads: 137
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Abstract


SnO2 is a wide band-gap metal oxide, it can provide with strong visible light permeability, low resistance and stable chemical properties etc, so it is a suitable window material for thin-film solar cells. In this thesis, SnO2 thin films with high visible light transmittance of 80%, low sheet resistance of 81?/□, strong adhesion to the substrate have been fabricated by PECVD （Plasma Enhanced Chemical Vapor Deposition） method on glass substrate.This paper includes the following four parts:（1） Some of the basic knowledge of the solar energy and the solar cell are introduced briefly. It focuses on the characteristics, the structures of the thin-film solar cells, as well as the choice of window material; the background and main subject of study are clarified in this paper.（2） The various methods of SnO2 film preparation and their advantages and disadvantages are introduced synthetically, and we choose the plasma enhanced chemical vapor deposition （PECVD） to prepare of SnO2 film by comparing the various methods; PECVD experiment platform is designed, and the various parts of the platform are introduced.（3） The SnO2 film was prepared in glass substrate with the raw material of SnCl2 and O2 by using PECVD, and their properties were analyzed by XRD, SEM, EDAX, UV, et al; the mechanism of the SnO2 film preparation using PECVD is disscused.（4） The effects of process parameters on the crystal structure, surface morphology and photovoltaic characteristics of the SnO2 film have been discussed. Though analyzing the experimental data, we find that the SnO2 film is symmetrical and its performance of photoelectricity is also preferable. The purpose and tenet of this thesis is focused on the SnO2 film using in the thin-film solar cells. That SnO2 film fabricated by PECVD is an edificatory attempt. The results obtained are useful for reference to the choice of actual process.

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CLC: > Industrial Technology > Electrotechnical > Independent power supply technology (direct power) > Photocell > Solar cells > Thin film solar cells
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