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Poly (ethylene terephthalate) (PET) is a comprehensive performance excellent barrier polymer material, but as beer, beverages and other packaging materials, the permeability is still unable to meet their specific packaging requirements, in order to satisfy the packaging shelf life, still need to be further modified on the PET material, the surface of the PET substrate coated with the dielectric barrier layer is the best solution to solve this problem. Silicon oxide dielectric barrier material with good barrier properties, a wide temperature range, good microwave permeability, excellent transparency and recyclable, environment-friendly, non-polluting characteristics, the use of silicon oxide dielectric barrier material modification PET packaging materials are gradually replacing the traditional glass bottles and aluminum-plastic composite packaging materials, to obtain a satisfactory packaging is valid and consumers at home in the packaging industry, has developed a series of SiOx composite film in Japan, the United States, Europe and other developed countries. This subject uses microwave electron cyclotron resonance plasma apparatus (MWECR), hexamethyldisiloxane (HMDSO) is a monomer, an argon gas as a carrier, oxygen as a reactive gas, a silicon oxide film on the PET substrate, deposition studies. In the silicon oxide film in the manufacturing process, by changing the microwave input power, the parameters of the film deposition time, working pressure, oxygen and the monomer ratio was prepared in different reaction conditions a silicon oxide film. Fourier transform infrared spectroscopy (FTIR), photoelectron spectroscopy (EDX), scanning electron microscopy (SEM), contact angle measurement, tensile testing machine, visible light transmittance analyzer, oxygen transmission rate tester characterization methods, PET film after the deposition of silicon oxide films of molecular structure, surface morphology, mechanical properties, optical properties, and oxygen barrier detailed study. The results show that: using the MWECR plasma apparatus can be deposited on the PET substrate adhesion preferably integrated performance of the silicon oxide barrier material, the visible light transmittance can reach 90%, almost the same as with the non-silicon oxide is deposited PET film, However, the oxygen transmission rate has been greatly improved. And discharge power, deposition time and oxygen monomer ratio are the main parameters affect its performance, the analysis found, the reactive power 700W, oxygen and monomer ratio of 1:1, and the deposition time of 50min during deposition of silicon oxide the membrane oxygen barrier best rate.
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