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Molecular Dynamics Study of Adhesion in MEMS

Author: ShenHaiLan
Tutor: TianWenChao
School: Xi'an University of Electronic Science and Technology
Course: Precision instruments and machinery
Keywords: Molecular dynamics simulations Adhesive contact MEMS
CLC: TB383.1
Type: Master's thesis
Year: 2008
Downloads: 172
Quote: 1
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Abstract

MEMS development has 20 years' time, but adhesion problems has been hampered by MEMS products to enter the market, is the urgent need to address the key issues of the MEMS technology. Molecular dynamics simulation as a method of numerical experiments, theoretical analysis and experimental observations make it difficult to understand the phenomenon of a certain interpretation. Molecular dynamics simulation is an effective method to study the adhesion problems. Adhesion in MEMS Au material is selected to study means of molecular dynamics simulations, analog MEMS spherical model contact process, considering the attraction and repulsion, and the simulation results are analyzed. This paper first introduces the basic principles of molecular dynamics simulation technology, and then establish a molecular dynamics simulation model, and to determine the molecular dynamics simulations of various simulation parameters. Simulation EAM potential function to describe the interactions between atoms, Velocity-Verlet algorithm for solving the system equations of motion. This study changes in the atomic configuration in the spherical model contact process; discussed in the case of the pressure distribution of the various stages in the contact region of the contact process; analysis of the relationship of the contact radius with the contact force as well as the change of the displacement of the indenter; analysis of the contact force with changes in relation with the displacement of the indenter, and the relationship of the contact force and the contact region atomic layer; analyzes the total energy of the system in contact with the process and system change over time relationship potential relationship with the change of the displacement of the indenter. This article uses the C language, the problem of micro / nano-contact molecular dynamics study, the code is streamlined and easy to understand, portability, improved molecular dynamics simulation programming style. The study showed that: the indenter gradually close to the substrate surface, the surface of the substrate in the role of adhesion to \the pressure head is connected to the base body material necking necked separation phenomenon; process of separation adhesive contact force phase for adhesive contact process, the contact force is rendered obvious lag This showed that adhesive force during separation adhesive on the elastic base of the atomic configurations have a greater impact; magnitude of the force of contact with the upper surface of the contact areas only a few layers of atoms; compressed state, the contact region near atoms under pressure, distant atoms tensioning; crystal deformation in the contact process. and atomic migration phenomenon.

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