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Multi- degree of freedom joints direct drive system (ultrasonic motor) is the inverse piezoelectric effect of the piezoelectric material , the electrical energy directly into mechanical vibration energy , and the use of friction into the movement of rotation, or other means , i.e. is the pressure in the polarization new stator constituted by the dielectric ceramic and metal with the AC power , so that the stator surface of the mechanical vibrations of the ultrasonic frequency , the metal material composed of rotation of the rotor of a direct drive motor . Japan , Germany , France , the United States , Britain , South Korea , Spain , Portugal , Poland and other countries currently engaged in the research and its application of the ultrasonic motor development . Ultrasonic motor with low speed and high torque , no electromagnetic interference , fast response action , high positioning accuracy , structural diversification , the excellent characteristics of the input self-locking superior than the traditional electromagnetic motor performance in the field of non - continuous motion , precision control 's . Of ultrasonic motor has more than 10 years of history , the ultrasonic motor is gradually applied to a number of military and civilian projects , but industrial production is still blank . The main work and results of this paper are as follows: First , the analysis of the characteristics of the ultrasonic motor development , application , and its classification , summarizes and more self- degree ultrasonic motor development history and the present state of research , analysis of three degrees of freedom of the motor direction of research and difficulty. Secondly, the systematic analysis of the mechanism of the the cylindrical stator three degrees of freedom ultrasonic motor by the excitation of the two-phase run around the three axes of rotation and the corresponding trajectory . The application of geometric principles and vibration theory derived the cylindrical stator three degrees of freedom ultrasonic motor three-phase excited trajectory equation and the trajectory equations based simulation of the same frequency, phase difference , different voltage excitation position movement trajectory analysis of the impact of these three factors on the surface of the stator point trajectory control and attitude control provides a theoretical basis for the trajectory of the three degrees of freedom ultrasonic motor . Third: the finite element modeling of piezoelectric material and cylindrical stator ansys finite element software to draw closer to the stator has two orthogonal bending mode vibration modal analysis of the stator , the last model the emulation analysis, the results of the study of the output .
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